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SEC-400 / 500
(thermal control valve, elastomeric or metal seals)
SEC-E400J
(solenoid control valve, metal seals)
SEC-E40/-50/-60/-70/-80
(solenoid control valve, elastomeric or metal seals)
SEC-4400
(piezo control valve, elastomeric or metal seals)
SEC-4001
(piezo control valve, elastomeric or metal seals)
SEC-V100DM
(DIGITAL MFC,solenoid control valve, metal seals)
SEC-F700
(DIGITAL MFC, piezo control valve,
metal seals)
FM
(Mass flow meters,
all series)
Control unit for Mass Flow
Controllers
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Mass Flow Meter
STEC Mass Flow Meter have the same features of Mass Flow Controllers, but without reducing valve.
They are ideal in all measurement applications.
Manufacturing features
- Elastomeric or metal seals
- Very small sensor diameter
- SUC option: Internal electropolished surface (Ra= 1 microinch)
Technical features
- Accuracy : +/- 1% f.s.
- Repeatability : +/- 0,2% f.s.
- Standard fitting : 1/4" / 3/8" VCR™ or Swagelok™
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