STEC

Mass Flow Meter

SEC-400 / 500
(thermal control valve, elastomeric or metal seals)

SEC-E400J
(solenoid control valve, metal seals)

SEC-E40/-50/-60/-70/-80
(solenoid control valve, elastomeric or metal seals)

SEC-4400
(piezo control valve, elastomeric or metal seals)

SEC-4001
(piezo control valve, elastomeric or metal seals)

SEC-V100DM
(DIGITAL MFC,solenoid control valve, metal seals)

SEC-F700
(DIGITAL MFC, piezo control valve, metal seals)

FM
(Mass flow meters, all series)

Control unit for Mass Flow Controllers



Mass Flow Meter

STEC Mass Flow Meter have the same features of Mass Flow Controllers, but without reducing valve. They are ideal in all measurement applications.

Manufacturing features
- Elastomeric or metal seals
- Very small sensor diameter
- SUC option: Internal electropolished surface (Ra= 1 microinch)

Technical features
- Accuracy : +/- 1% f.s.
- Repeatability : +/- 0,2% f.s.
- Standard fitting : 1/4" / 3/8" VCR™ or Swagelok™

 

Model
Range
Seals
Note
SEF-4000 Series
5 sccm - 100 slm
Viton / SUS 316L
Analogue MFM
SEF-4001 Series
5 sccm - 20 slm
Viton / SUS 316L
Analogue MFM - Fast Response
SEF-7300 Series
1 sccm - 100 slm
Viton / SUS 316L
Compact MFM
SEF-400 Series
5 sccm - 50 slm
Viton / SUS 316L
Low cost MFM
SEF-V100 Series
10 sccm - 50 slm
Viton / SUS 316L
Digital MFM
     

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Vinton is DuPont Dow Elastomers' trade mark