Reser

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Reser

Robot Refurbishment Program documentat

Maintenance Leak Check Adapter documentation

Maintenance Control Box documentation

Today’s critical process requirements for semiconductor equipment require complex mechanics inside the different components of semiconductor equipment. For example rotational doorplates in vertical furnaces. To verify if such rotation doorplate is leak tight before starting installation of the doorplate in the equipment, RESER developed an adapter to test the doorplate, which can be connected to the standard leak test equipment in your facility. The flange to the leak test equipment can be made according to customer specifications. The adapter can be delivered for all sizes doorplates, and is standard available for 200mm and 300 mm equipment. The adapter can be used to leak test the rotational mechanism in the center of the doorplate and possible leakage due to a scratch in the O-ring gap surrounding the doorplate.

For more details see pdf file