STEC

SEC-400 / 500
(thermal control valve,elastomeric or metal seals)

SEC-E400J
(solenoid control valve, metal seals)

SEC-E40/-50/-60/-70/-80
(solenoid control valve, elastomeric or metal seals)

SEC-4400
(piezo control valve, elastomeric or metal seals)

SEC-4001
(piezo control valve,elastomeric or metal seals)

SEC-V100DM
(DIGITAL MFC,solenoid control valve, metal seals)

SEC-F700
(DIGITAL MFC, piezo control valve, metal seals)

FM
(Mass flow meters, all series)

Control unit for Mass Flow Controllers

SEC-4001 Series

Elastomeric or metal seals
PIEZO control valve normally closed and normally open
Options: "Ultra clean" electropolished surface finish

This new mass flow controllers series improve, where is possible, the performance of 4000 series, in paticular accuracy and response time. Strongly recommended for all applications with pure and iper-pure gases.
Full scale from 5 sccm to 20 SLM.

Available also in Mass Flow Meter version, use " SEF- " suffix instead " SEC- "

Manufacturing features
- Elastomeric or metal seals
- PIEZO control valve normally closed and normally open
- Very small sensor diameter
- Electrical signal/drive power source connector with 9 D- subminiature pins
- SUC option: Internal electropolished surface (Ra = 0.035micro-m)

Technical features
- Accuracy: +/- 1% f.s.
- Linearity: +/- 0,5% f.s.
- Repeatability: +/- 0,2% f.s.
- Max.Inlet pressure: 50-300 kPa / 100-300 kPa
- Standard fitting: 1/4" VCR™
- Electric signal: Power supply +/- 15 Vdc;
- Flow Rate Setting Signal : 0-5 Vdc