STEC

SEC-400 / 500
(thermal control valve, elastomeric o metal seals)

SEC-E400J
(solenoid control valve, metal seals)

SEC-E40/-50/-60/-70/-80
(solenoid control valve, elastomeric or metal seals)

SEC-4400
(piezo control valve, teelastomeric or metal seals)

SEC-4001
(piezo control valve, elastomeric or metal seals)

SEC-V100DM
(DIGITAL MFC,solenoid control valve, metal seals)

SEC-F700
(DIGITAL MFC, piezo control valve, metal seals)

FM
(Mass flow meters, all series)

Control unit for Mass Flow Controllers

SEC-4400 Series

Elastomeric or metal seals
PIEZO control valve normally closed and normally open
Options: "Ultra clean" electropolished surface finish

Best selling ultra clean analogue mass flow controller. The SEC-4400 series were developed as the first ultra clean MFC in the world.
Full scale from 5 sccm to 100 SLM.

Available also in Mass Flow Meter version, use " SEF- " suffix instead " SEC- "

Manufacturing features
- Elastomeric or metal seals
- PIEZO control valve normally closed and normally open
- Very small sensor diameter
- Electrical signal/drive power source connector with 9 D- subminiature pins
- Options SUC: Internal electropolished surface (Ra = 0.035micro-m)

Technical features
- Accuracy: +/- 1% f.s.
- Linearity: +/- 0,5% f.s.
- Repeatability: +/- 0,2% f.s.
- Max.Inlet pressure: 50-300 kPa / 100-300 kPa
- Standard fitting: 1/4" VCR™ and 3/8" VCR™
- Electric signal: Power supply +/- 15 Vdc;
- Flow Rate Setting Signal : 0-5 Vdc