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SEC-400 / 500
(thermal control valve, elastomeric or metal seals)
SEC-E400J
(solenoid control valve, metal seals)
SEC-E40/-50/-60/-70/-80
(solenoid control valve, elastomeric or metal seals)
SEC-4400
(piezo control valve, elastomeric or metal seals)
SEC-4001
(piezo control valve, elastomeric or metal seals)
SEC-V100DM
(DIGITAL MFC,solenoid control valve, metal seals)
SEC-F700
(DIGITAL MFC, piezo control valve,
metal seals)
FM (Mass
flow meters, all series)
Control unit for Mass Flow
Controllers |
 
SEC-E40/-50/-60/-70/-80 Series
Elastomeric seals
SOLENOID control valve normally closed Options: "Ultra clean" electropolished surface finish
This Mass Flow Controllers, ideal
for general purpose, have a large full scale range with a good quality,
like all Stec products. With its lowest cost this type of MFC is the
optimal solution for low budget projects.
Manufacturing features
- Elastomeric seals
- SOLENOID control valve normally closed - Very small sensor diameter
- Electrical signal/drive power source connector with 9 D- subminiature pins
- Option SUC: Internal electropolished surface (Ra = 0.035micro-m)
Technical features
- Accuracy: +/- 1% f.s. - Linearity: +/-
0,5% f.s. - Repeatability: +/- 0,2% f.s.
- Max.Inlet pressure: 50-300 kPa (E40); 100-300 kPa (E50/-60/-70); 200-350
kPa (E80)
- Standard fitting: 1/4" VCR™ or Swagelok (E40/-50); 3/8" Swagelok
(E60/-70); 1/2" Swagelok (E80)
- Electric signal: Power supply +/- 15 Vdc;
- Flow Rate Setting Signal : 0-5 Vdc
| Model |
Flow range |
Wetted materials |
| SEC-E40 |
10 sccm - 10 SLM |
Viton |
| SEC-E50 |
20 SLM - 30 SLM |
Viton |
| SEC-E60 |
50 SLM - 100 SLM |
Viton |
| SEC-E70 |
200 SLM |
Viton |
| SEC-E80 |
300 SLM - 500 SLM |
Viton |
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To order electropolished version MFC add -SUC to the code. |
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