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SEC-400 / 500
(valvola termica, elastomeric or metal seals)
SEC-E400J
(solenoid control valve, metal seals)
SEC-E40/-50/-60/-70/-80
(solenoid control valve, elastomeric or metal seals)
SEC-4400
(piezo control valve, elastomeric or metal seals)
SEC-4001
(piezo control valve, elastomeric or metal seals)
SEC-V100DM
(DIGITAL MFC,solenoid control valve, metal seals)
SEC-F700
(DIGITAL MFC, piezo control valve,
metal seals)
FM (Mass
flow meters, all series)
Control unit for Mass Flow
Controllers |
  SEC-E400J Series
Metal seals
SOLENOID control valve normally closed Options: "Ultra clean" electropolished surface finish
This Mass flow controllers are recommended in all apllications that need high quality and low cost.
Available only with metal seals.
Manufacturing features
- Metal seals - SOLENOID control valvenormally closed - Very small sensor diameter
- Electrical signal/drive power source connector with 9 D- subminiature pins
- Option SUC: Internal electropolished surface (Ra = 0.035micro-m)
Technical features
- Accuracy: +/- 1% f.s. - Linearity: +/-
0,5% f.s. - Repeatability: +/- 0,2% f.s. - Max.Inlet pressure:
50-300 kPa (SEC-E440J); 100-300 kPa (SEC-E450J) - Standard fitting:
1/4" VCR™ - Electric signal: Power supply +/- 15
Vdc;
- Flow Rate Setting Signal : 0-5 Vdc
| Model |
Flow range |
Wetted materials |
| SEC-E440J |
10 sccm - 10
SLM |
Metalliche SUS
316L |
| SEC-E450J |
20 SLM - 30
SLM |
Metalliche SUS
316L |
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To order electropolished version MFC add -SUC to the code.
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