STEC

SEC-400 / 500
(valvola termica, elastomeric or metal seals)

SEC-E400J
(solenoid control valve, metal seals)

SEC-E40/-50/-60/-70/-80
(solenoid control valve, elastomeric or metal seals)

SEC-4400
(piezo control valve, elastomeric or metal seals)

SEC-4001
(piezo control valve, elastomeric or metal seals)

SEC-V100DM
(DIGITAL MFC,solenoid control valve, metal seals)

SEC-F700
(DIGITAL MFC, piezo control valve, metal seals)

FM
(Mass flow meters, all series)

Control unit for Mass Flow Controllers

SEC-F700 Digital Series

Metal seals
PIEZO control valve normally closed and normally open
Options: "Ultra clean" electropolished surface finish

Advanced components for the best Mass flow controller to use in all particular applicattions that requires very high quality. Accuracy, linearity e repeatbility are at the state of art for this type of product.
See the technical data-sheet for a complete valutation. Full scale from 5 sccm to 30 SLM.

Manufacturing features
- Metal seals
- PIEZO control valve normally closed and normally open
- Very small sensor diameter
- Electrical signal/drive power source connector with 9 D- subminiature pins
- Digital interface RS-422 - RJ daisy chain
- Internal electropolished surface (Ra = 0.035micro-m)

Technical features
- Accuracy: +/- 0,3% f.s.
- Linearity: +/- 0,5% f.s.
- Repeatability: +/- 0,2% f.s.
- Max.Inlet pressure: 50-300 kPa
- Standard fitting: 1/4" VCR™
- Electric signal: Power supply +/- 15 Vdc;
- Flow Rate Setting Signal : 0-5 Vdc / Digital

- Digital interface RS 422 - RS 232 - RS 485 - ( 9600 bps )