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SEC-400 / 500
(valvola termica, elastomeric or metal seals)
SEC-E400J
(solenoid control valve, metal seals)
SEC-E40/-50/-60/-70/-80
(solenoid control valve, elastomeric or metal seals)
SEC-4400
(piezo control valve, elastomeric or metal seals)
SEC-4001
(piezo control valve, elastomeric or metal seals)
SEC-V100DM
(DIGITAL MFC,solenoid control valve, metal seals)
SEC-F700
(DIGITAL MFC, piezo control valve,
metal seals)
FM (Mass
flow meters, all series)
Control unit for Mass Flow
Controllers |
 
SEC-V100DM Digital Series
Metal seals
SOLENOID control valve normally closed and normally open
Options:"Ultra clean" electropolished surface finish
With all benefits of digital mode this mass flow controllers have very low cost and reduced dimension, ideal for projects where
space is a critical factor.
Many additional functions improved in the dedicated software.
These MFC are the optimal solution in all projects where the space is a critical factor.
Full scale from 5 sccm to 50 SLM.
Available
also in Mass Flow Meter version, use " SEF- " suffix instead
" SEC- "
Manufacturing features
- Metal seals
- SOLENOID control valve normally closed and normally open
- Very small sensor diameter
- Electrical signal/drive power source connector with 9 D- subminiature pins
- Digital interface RS-422 - RJ daisy chain
- Option SUC: Internal electropolished surface (Ra
= 0.035micro-m)
Technical features
- Accuracy: +/- 1% f.s. - Linearity: +/-
0,5% f.s. - Repeatability: +/- 0,2% f.s.
- Max.Inlet pressure: 50-300 kPa
- Standard fitting: 1/4" VCR™
- Electric signal: Power supply +/- 15 Vdc;
- Flow Rate Setting Signal : 0-5
Vdc / Digital
| Model |
Flow range |
Wetted materials |
| SEC-V111DM |
10 sccm - 5 SLM |
SUS 316L / PTFE |
| SEC-V121DM |
20 SLM - 50 SLM |
SUS 316L / PTFE |
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To order electropolished version MFC add -SUC to the code.
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