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ISO 9001 © Techno Fittings S.r.l.

Company ISO 9001 certified

Certification number: 75176272157

Italian VAT no: IT 03745691000
VG Series

Measurement principle and configuration
The sensing unit contains a tensioned diaphragm, PR (reference side) which contains an electrode assembly placed in a sealed high vacuum reference cavity. Px (vacuum measurement) is exposed to the gas whose pressure is to be measured. The diaphragm deflects with the changing pressure. The capacitance change between the diaphragm and the adjacent electrode is sensed and is converted to a pressure signal electrical output.


Datasheet VG Series

  • Reading Scale Accuracy
  • High Stability
  • Pressure Measurement
  • Minimum Dead Volume ~50% less, reduces gas condensation
  • Pressure monitor of Semiconductor, FPD process
  • Pressure monitor of Vacuum heat treatment, vacuum drying.
  • Pressure monitor of vacuum inclusion
  • Pressure monitor of injection equipment, degassing equipment
  • Pressure monitor of coating equipment
  • Pressure monitor of all vacuum equipment



Model

VG-1A

VG-10A

VG-100A

VG-1000A

F.S. Range (Pa)

1.33*102 Pa
(1 Torr)

1.33*103 Pa
(10 Torr)

1.33*104 Pa
(100 Torr)

1.33*105 Pa
(1000 Torr)

Accuracy (%Rdg 0.1% F.S.)

0.5

0.5

0.5

1

Zero Temp. Coefficient (%F.S./C)

0.05

0.01

0.005

0.005

Span Temp. Coefficient (%Rdg/C)

0.02

0.02

0.015

0.015

Resolution (%F.S.)

less than 0.005

Response Time (ms)

50

Ambient Operating Temp. (C)

10~50

Bake Out Temp. (C)

70

Over Pressure

2.67*105 Pa (2000 Torr)

Wetted Material

Inconel, SUS316

Input Voltage

15VDC 5%

Analog Output

0~10VDC

Vacuum Fittings

1/2tube, 34 Conflat flange, NW/KF 16 flange, 8VCR-F



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