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© Techno Fittings S.r.l. Company ISO 9001 certified
Certification number: 75176272157
Italian VAT no: IT 03745691000
The sensing unit contains a tensioned diaphragm, PR (reference side) which contains an electrode assembly placed in a sealed high vacuum reference cavity. Px (vacuum measurement) is exposed to the gas whose pressure is to be measured. The diaphragm deflects with the changing pressure. The capacitance change between the diaphragm and the adjacent electrode is sensed and is converted to a pressure signal electrical output.
Datasheet VG Series -
Reading Scale Accuracy
- High Stability
- Pressure Measurement
- Minimum Dead Volume ~50%
less, reduces gas condensation
- Pressure monitor of Semiconductor, FPD process
- Pressure monitor of Vacuum heat treatment, vacuum drying.
- Pressure monitor of vacuum inclusion
- Pressure monitor of injection equipment, degassing equipment
- Pressure
monitor of coating equipment
- Pressure monitor of all vacuum equipment
|
Model |
VG-1A |
VG-10A |
VG-100A |
VG-1000A |
|
F.S. Range (Pa) |
1.33*102 Pa |
1.33*103 Pa |
1.33*104 Pa |
1.33*105 Pa |
|
Accuracy (%Rdg ±0.1% F.S.) |
±0.5 |
±0.5 |
±0.5 |
±1 |
|
Zero Temp. Coefficient (%F.S./°C) |
0.05 |
0.01 |
0.005 |
0.005 |
|
Span Temp. Coefficient (%Rdg/°C) |
0.02 |
0.02 |
0.015 |
0.015 |
|
Resolution (%F.S.) |
less than 0.005 |
|||
|
Response Time (ms) |
50 |
|||
|
Ambient Operating Temp. (°C) |
10~50 |
|||
|
Bake Out Temp. (°C) |
70 |
|||
|
Over Pressure |
2.67*105 Pa (2000 Torr) |
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|
Wetted Material |
Inconel, SUS316 |
|||
|
Input Voltage |
±15VDC ±5% |
|||
|
Analog Output |
0~10VDC |
|||
|
Vacuum Fittings |
1/2tube, Ø34 Conflat flange, NW/KF 16 flange, 8VCR-F |
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