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Company ISO 9001 certified

Certification number: 75176272157

Italian VAT no: IT 03745691000
EC-Series

EXHAUST CONTROL SYSTEM
Used to control the chamber pressure, a butterfly valve driven by a stepper motor. The stepper motor provides high speed response and high positioning accuracy.

  • Chamber Pressure Control
  • Two Models are Available
Datasheet EC Series




Model

EC-5104

EC-5105

EC-5202

Fittings

NW40

NW50

25mm Teflon Fittings

1 inch Teflon Fittings

Contact Materials

SUS-316L  ·  Viton

PTFE·PEEK·Viton

Conductance

(vacuum sphere)

0.4~80L/s

0.6~200L/s

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Leak in 100mm H2O

(full close)

15L/min

20L/min

3L/min



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