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© Techno Fittings S.r.l. Company ISO 9001 certified
Certification number: 75176272157
Italian VAT no: IT 03745691000
EC-Series
EXHAUST CONTROL SYSTEM
Used to control the chamber pressure, a butterfly valve driven by a stepper motor. The stepper motor provides high speed response and high positioning accuracy.
Datasheet EC Series
Used to control the chamber pressure, a butterfly valve driven by a stepper motor. The stepper motor provides high speed response and high positioning accuracy.
- Chamber Pressure Control
- Two Models are Available
Datasheet EC Series
|
Model |
EC-5104 |
EC-5105 |
EC-5202 |
|
|
Fittings |
NW40 |
NW50 |
25mm Teflon Fittings |
1 inch Teflon Fittings |
|
Contact Materials |
SUS-316L · Viton |
PTFE·PEEK·Viton |
||
|
Conductance (vacuum sphere) |
0.4~80L/s |
0.6~200L/s |
---------- |
|
|
Leak in 100mm H2O (full close) |
15L/min |
20L/min |
3L/min |
|
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