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© Techno Fittings S.r.l. Company ISO 9001 certified
Certification number: 75176272157
Italian VAT no: IT 03745691000
The compact point of use vaporizer, can be used to replace bubbler technology especially for vacuum coating applications.
Datasheet MI Series
The MI / MV mixing injector system from HORIBASTEC efficiently vaporizes and accurately controls the delivery of liquid based materials to the process.
The MI / MV replaces older bubbler technology, which inherently has stability problems caused by variations in temperature and pressure.
System Configuration Example
HORIBASTEC's MI measures the flow rate by mass using a high performance liquid mass flow meter (LFM) and the liquid source is vaporized by the MI. Simultaneously, the flow measurement signal from the LFM is routed to the MI, optimising control. The SEC series mass flow controller controls the introduction of the carrier gas to the MI. This system is capable of vaporization of liquid sources and vaporization into normal pressure environments.
|
MODEL |
MI-100 |
|
Generating flow rate |
Max. 10 g/min |
|
Inlet pressure |
0.1 to 3.0Mpa (G) |
|
Liquid type |
TEOS etc. |
|
Heating temperature |
Max 150°C |
|
Leak rate |
External leak less than 1*10-8
Pa m3/s
(He) |
|
Liquid / Gas wetted parts |
SUS-316L, PTFE |
|
Internal heater capacity |
AC 100V 70W (35W *2) |
|
Temperature sensor |
Thermocouple K type |
|
Fittings |
Liquid inlet 1/8" VCR male |
|
Pressure resistance |
1.0 MPa (Gauge) |
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