The LSC series is a lineup of liquid material gasification systems for materials such as TEOS, a popular series with a history of proven performance. The LSC-A100 is the newest model in the series, and is capable of generating high flow rates. As with previous models, the new LSC-A100 provides stable gasification of liquid materials without using a carrier gas. Furthermore, the compact LSC-A100 also provides high flow rate gasification.

Specification                      Datasheet LSC Series

Model LSC-A100 series Flow rate generated H2O 2SLM, TEOS 600 SCCM (Max.) Operating pressure Max. 1.33kPa Source tank volume 2.7L Heat regulation method PID control by the heat regulator Liquid surface detection method Floating switch Internal mass flow controller SEC-8400 series Air pressure valve Bellows type Materials in liquid connection and gas contact area SUS316L, PFA Operating Temperature 20 to 35°C External input Air pressure valve open/close, mass flow controller flow rate setting signal (0 to 5 V DC/0 to 100% F.S.), emergency stop signal, auto zero signal (option) External output Temperature alarm, liquid level H.H. alarm, liquid level signal (H, M, L), READY signal, mass flow controller flow rate output signal ((0 to 5 V DC/0 to 100% F.S.), thermoregulated bath internal fan stop alarm, valve voltage monitor (option) Power source AC 100 V, single phase 50/60 Hz, 1.5 kVA Other Auto-recharge system: Can be connected to LU series.

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