Gas supply systems require devices that are ultra-clean, compact, and support greater circuit integration. Lately there is increasing demand for devices that offer highly intelligent functioning in more intelligent gas supply systems. Mass flow controllers are commonly considered the core of gas supply systems, and the advance of digital mass flow controllers with CPUs is the focus of a great deal of attention.

Brochure:

Products brochure for this category

Products:

- SEC-Z500 Series
(Multi Gas / Multi Range Mass Flow Controller)

- SEC-Z10D series Devicenet ™ Controlled
(First 300mm Standard DeviceNet™ Controlled MFC)

- SEC-F700 series
(Compact Digital Piezo Mass Flow Controller. High Accuracy. Fast Response.)


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