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Insensitive Pressure Mass Flow Modules

Pressure Insensitive Mass Flow Module

High stability Mass Flow Module- Gas flow control is unaffected by upstream and downstream pressure fluctuations.


Thermal Sensor Detection and Differential Pressure Detection are both multifunctional Pressure Insensitive Mass Flow Module and perform high accuracy.

Thermal Sensor Detection PI Mass Flow Module SEC-Z700 series
 
Differential Pressure Detection PI Mass Flow Module CRITERION D200 series
Z700   CRITERION

Overview

SEC-Z700 series and CRITERION D200 series give stable flow rate control even with upstream and downstream pressure fluctuations. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid mass flow controller crosstalk phenomenon caused by pressure fluctuations.

The new types of mass flow controller, SEC-Z700 series and CRITERION D200 series exhibit high stability and control the gas flow without effect of upstream and downstream pressure fluctuations. They not only give a flow rate output but also the temperature and pressure readings. Control interface is by analog, RS-485 and DeviceNet™ communication. Suitable for the high performance, compact and weight saving of the gas line.

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