Thermal Sensor Detection and Differential Pressure Detection are both multifunctional Pressure Insensitive Mass Flow Module and perform high accuracy.

Thermal Sensor Detection PI Mass Flow Module SEC-Z700 series		Differential Pressure Detection PI Mass Flow Module CRITERION D200 series

Overview

SEC-Z700 series and CRITERION D200 series give stable flow rate control even with upstream and downstream pressure fluctuations. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid mass flow controller crosstalk phenomenon caused by pressure fluctuations.

The new types of mass flow controller, SEC-Z700 series and CRITERION D200 series exhibit high stability and control the gas flow without effect of upstream and downstream pressure fluctuations. They not only give a flow rate output but also the temperature and pressure readings. Control interface is by analog, RS-485 and DeviceNet™ communication. Suitable for the high performance, compact and weight saving of the gas line.

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