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Company ISO 9001 certified

Certification number: 75176272157

Italian VAT no: IT 03745691000
RGA - Residual Gas Analyzer


Micropole™ System, the worlds smallest complete mass spectrometer system. The small size, low cost, and component interchangeability provides the users with easy upgrades, troubleshooting, and replacement.



Datasheet RGA

Micropole™ is a miniature array of quadrupole mass spectrometers which has 9 detection parts using 16 original column electrodes. This allow for easy integration into small spaces whilst still getting state of the art resolution.
In addition, the ability to operate at higher pressures without using a differential pump, makes this suitable for gas monitoring, both during process and after chamber cleaning.

micropole.jpg
micropole.jpg



PlasmGuard (SMPA) *1

smpa-1-2/45

smpa-11-2/45

smpa-7-2/65

smpa-5-2/65

smpa-5-2/100

smpa-1-4/300

Micropole Analyzer (MPA) *1

mpa6-1-2/45

mpa6-11-2/45

mpa6-7-2/65

mpa6-5-2/65

mpa6-5-2/100

mpa6-1-4/300

Mass Range (AMU)

2~45

2~45

2~65

2~65

2~100

4~300

Resolution (FWHM)

0.5 AMU

1.5 AMU

0.9 AMU

0.8 AMU

1 AMU

1.5 AMU

Maximum Operating Pressure N2

0.133Pa

1mTorr

1.466Pa

11mTorr

0.933Pa

7mTorr

0.666Pa

5mTorr

0.666Pa

5mTorr

0.133Pa

1mTorr

Minimum Detectable Partial Pressure for Slow Scan Updates

1.33*10-8 Pa N2
1*10-10 Torr N2

Fastest Scan Updates / AMU

0.6 sec

Minimum Detectable He Leak Rate

2*10-9 Pa m3/sec

2*10-8 atm cm3/sec

2*10-8 Pa m3/sec

2*10-7atm cm3/sec

2*10-9 Pa m3/sec

2*10-8 atm cm3/sec

Filament Material

Y2O3/lr (standard) or Pure W

Maximum Operating Temperature

150°C (Max. bake out temperature : 350°C

Flange

Type C: Ø34 Conflat Flange
Type K : KF-16 Flange

Spectra Converter Type *2

SC6-18

SC6-14

SC6-11

SC6-07

 

Digital Interface

RS232C / RS485 (Selected Baud Rate : 9,600 / 19,200 / 38,400

Software

WinMPA (Microsoft Windows XP, 2000, Me, NT4.0, 95/98, 3.1, 3.11)
*1. Micropole Analyzer has two types (MPA / SMPA). SMPA is protected by a mesh, on the vacuum fitting, designed to extend the lifetime of the sensor in harsh environments such as plasma processes.
*2. Chose electron energy, 70eV or 43eV through PC
*AMU : Atomic Mass Unit



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