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Computer Services
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Company ISO 9001 certified

Certification number: 75176272157

Italian VAT no: IT 03745691000
Sec-4000 Series

BEST SELLING ULTRA CLEAN ANALOGUE MASS FLOW CONTROLLER

The SEC-4000 series were developed as the first ultra clean MFC in the world. The superior design of the SEC-4000 series such as all metal sealing and construction, and a high speed metal diaphragm valve made this the first choice of many customers, as a standard for the semiconductor process.

Datasheet SEC-4000

  • Stainless Diaphragm Metal O - ring (M type)

  • High Purge MFC / SEC-4400SP

  • Wide Range MFC / SEC-4400SR

  • Free Mounting Orientation MFC / SEC-4400MF4500MF Applicable Gas:C3F6C3F8C3F8SF6SiF8 etc.



sec-4000 Technical Informations

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