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Computer Services
ISO 9001 © Techno Fittings S.r.l.

Company ISO 9001 certified

Certification number: 75176272157

Italian VAT no: IT 03745691000
SEC-8000 / 2000 series

MASS FLOW CONTROLLER FOR HIGH TEMPERATURE
  • Piezo Actuator / SEC-8000 series

  • Thermal Actuator / SEC-2000 series

  • Up to 120C (150C Bakeable)


Datasheet SEC-8000/2000 Series

SEC-

(Mass Flow Controller)

8340

8440

8450

8455

8460

2410

2510

2551

SEF-

(Mass Flow Meter)

-------

8440

8450

8455

8460

2410

2510

2551

Wetted Materials

SUS-316L

SUS-316L, Viton

Valve Type

open at power-off

Flow Range

(for N2 F.S.)

5/10/20/30/50/100/200/300/500 SCCM

1/2 SLM/1~5 SLE (SEF)

5/10 SLM

10/20 SLM

20/30/50 SLM

10/20/30/50/100

200/300/500 SCCM

1/2/5 SLM

10/20 SLM

30/50/100 SLM

Flow Control Range

2~100% F.S.

5~100% F.S.

Response

less than 2 seconds (T98)

less than 6  seconds (T98)

Accuracy

1% F.S.

Linearity

0.5% F.S.

Repeatability

0.2% F.S.

Operating Differential

Pressure (for SEC)

50~300kPa(d)   {0.5~3.0kgf/cm2(d)}

100~300kPa(d)  {1.0~3.0kgf/cm2(d)}

50~300kPa(d)   {0.5~3.0kgf/cm2(d)}

100~300kPa(d)  {1.0~3.0kgf/cm2(d)}

Operating Differential

Pressure (for SEF)

1~50kPa(d)   {0.01~0.5kgf/cm2(d)}

Pressure Resistance

1000kPa   {10kgf/cm2(G)}

Leak Rate

5x10-12Pam3/s(He)   {5x10-11atmcc/sec(He)}

1x10-8Pam3/s(He)   {1x10-7atmcc/sec(He)}

Operating Temperature

15~120C baking temperature 150C(MAX)

35~80C baking temperature 120C(MAX)

Flow Rate Setting Signal

0.1~5VDC

0.25~5VDC

Flow Rate Output Signal

0~5VDC

Power Supply

+15V0.5VDC  60mA  -15V0.5VDC  60mA  1.8VA

SEC-8340S  for heater  AC100V  56VA

+15V0.5VDC  60mA 

-15V0.5VDC  150mA  3.15VA

Standard Fitting

1/4" VCR

3/8" VCR

1/4" VCR

3/8" VCR


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