SEC-

(Mass Flow Controller)

8340

8440

8450

8455

8460

2410

2510

2551

SEF-

(Mass Flow Meter)

-------

8440

8450

8455

8460

2410

2510

2551

Wetted Materials

SUS-316L

SUS-316L, Viton

Valve Type

open at power-off

Flow Range

(for N₂ F.S.)

5/10/20/30/50/100/200/300/500 SCCM

1/2 SLM/1~5 SLE (SEF)

5/10 SLM

10/20 SLM

20/30/50 SLM

10/20/30/50/100

200/300/500 SCCM

1/2/5 SLM

10/20 SLM

30/50/100 SLM

Flow Control Range

2~100% F.S.

5~100% F.S.

Response

less than 2 seconds (T98)

less than 6  seconds (T98)

Accuracy

±1% F.S.

Linearity

±0.5% F.S.

Repeatability

±0.2% F.S.

Operating Differential

Pressure (for SEC)

50~300kPa(d)   {0.5~3.0kgf/cm²(d)}

100~300kPa(d)  {1.0~3.0kgf/cm²(d)}

50~300kPa(d)   {0.5~3.0kgf/cm²(d)}

100~300kPa(d)  {1.0~3.0kgf/cm²(d)}

Operating Differential

Pressure (for SEF)

1~50kPa(d)   {0.01~0.5kgf/cm²(d)}

Pressure Resistance

1000kPa   {10kgf/cm²(G)}

Leak Rate

5x10^-12Pa·m³/s(He)   {5x10^-11atm·cc/sec(He)}

1x10^-8Pa·m³/s(He)   {1x10^-7atm·cc/sec(He)}

Operating Temperature

15~120°C baking temperature 150°C(MAX)

35~80°C baking temperature 120°C(MAX)

Flow Rate Setting Signal

0.1~5VDC

0.25~5VDC

Flow Rate Output Signal

0~5VDC

Power Supply

+15V±0.5VDC  60mA  -15V±0.5VDC  60mA  1.8VA

SEC-8340S  for heater  AC100V  56VA

+15V±0.5VDC  60mA 

-15V0.5VDC  150mA  3.15VA

Standard Fitting

1/4" VCR

3/8" VCR

1/4" VCR

3/8" VCR