Model. SEC-

E40

E50

E60

E70

E80

Gas wetted material

SUS-316L, Viton, PTFE

SUS-316L, Viton

Valve Type

Solenoid Valve

Flow Range

10/20/30/50sccm
100/200/300/500sccm
1/2/3/5slm

20/30slm

50/100slm

200slm

300/500slm

Flow control range

2~100% FS

5~100% FS

Response time

< 1 second

< 2 seconds

Accuracy

± 1%

± 2%

Linearity

± 0.5%

± 1%

Repeatability

± 0.2%

± 1%

Operating Pressure

50-300kPa

100-300kPa

200-350kPa

Pressure Resistance

1000kPa

Leak Rate

<1*1-8Pa*m3/s(He)

<1*1-7Pa*m3/s(He)

450kPa(G) pressurization 10 min. pressure reduction within 1%

Operating Temperature

5-50ºC (Guaranteed 15-35°C)

5-45ºC (Guaranteed 15-35°C)

Flow Set Signal

DC 0.1-5V (>1Mohm input impedance)

DC 0.25-5V (>1Mohm input impedance)

Flow Output Signal

DC 0-5V (minimum load resistance 2k ohm)

Power

DC +15V ±5% 50mA, DC -15V ±5% 150mA,

Fitting

1/4" VCR, 1/4" swagelok

3/8" swagelok style

1/2" swagelok style