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Computer Services
ISO 9001 © Techno Fittings S.r.l.

Company ISO 9001 certified

Certification number: 75176272157

Italian VAT no: IT 03745691000
Sec-F700

COMPACT DIGITAL PIEZO MASS FLOW CONTROLLER
HIGH ACCURACY. FAST RESPONSE:SEC-F700 SERIES

  • High Accuracy / Digital Linear : Multiple calibration data curves for different gas capability.
  • Fast Response for All Flow Range / Digital PID
  • Diagnose MFC Problems by Various Alarm Functions / flow rate setting, out signal, valve, valve clearance, sensor, power, temperature of PC board
  • Available with IGS
Datasheet F700

Model SEC-

F730

F740

F750

Wetted Materials

SUS-316L

Valve Type

open at power-off   close at power-off

Flow Range

5/10/20/30/50/100 200/300/500 SCCM 1/2 SLM

3/5/10 SLM

20/30 SLM

Flow Control Range

2~100% F.S.

Response

less than 1 second (T98)

Accuracy

20~100% 0.8% F.S. 2~20% 0.3% F.S.

Linearity

0.5% F.S.

Repeatability

0.2% F.S.

Operating Differential
Pressure
5 SCCM~5 SLM:50~300kPa (7~42psi)
10 SLM~20 SLM:100~300 kPa (14~42psi)
30 SLM:150~300kPa (21~42psi)
Pressure
Resistance

1MPa (140psi)

Leak Rate

5x10-12 Pam3/s (He)

Operating
Temperature

5~50C (accuracy insurance: 15~35C)

Flow Rate
Setting Signal

0.1~5VDC / digital

Flow Rate
Output Signal

0~5VDC / digital

Digital Interface

Non-synchronized
RS-422A (232C/485):9600bps
(Baud Rate : RS-232C (for DS-3)):1200bps

Power Supply

+15V0.5VDC  140mA
-15V0.5VDC  120mA  3.9VA

Fittings

1/4 VCR equivalents*



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