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Company ISO 9001 certified

Certification number: 75176272157

Italian VAT no: IT 03745691000
Pressure Insensitive Mass Flow Module

High stability Mass Flow Module- Gas flow control is unaffected by upstream and downstream pressure fluctuations.

Thermal Sensor Detection PI Mass Flow Module SEC-Z700 series

•Stable flow control by newly developed "Variable PID system" (patent pending)

  • Multi Gas / Multi Range function. - The gas type and full scale flow rate can be changed by the customer.
  • Variable PID function gives high speed response (within 1 sec) across the whole flow range.
  • Compact gas line. - No need for the regulator, transducer and filter.
  • Stable control of the gas flow without effect by upstream and downstream pressure fluctuations.
  • Integrated Inlet Pressure Sensor.
  • On board Multi display.
  • Warranty 1% Set Point high accuracy.
  • Ultra clean design - Metal diaphragm, all stainless SUS-316L and polished surface treatment(standard).
  • Compact size - Same fitting to fitting dimension up to 50 SLM.
  • Signal compatibility - Analog/RS485 Digital Model , DeviceNet™ Model.
  • Network function - Controlled by digital signal.

Flow control condition

Flow control condition
During 50kPa, upstream pressure fluctuation, Z700 can make stable flow control.

Test flow


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