Insensitive Pressure Insensitive Mass Flow Modules

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Z700

Pressure Insensitive Mass Flow Module

High stability Mass Flow Module- Gas flow control is unaffected by upstream and downstream pressure fluctuations.

Thermal Sensor Detection PI Mass Flow Module SEC-Z700 series

•Stable flow control by newly developed "Variable PID system" (patent pending)

Features

Multi Gas / Multi Range function. - The gas type and full scale flow rate can be changed by the customer.
Variable PID function gives high speed response (within 1 sec) across the whole flow range.
Compact gas line. - No need for the regulator, transducer and filter.
Stable control of the gas flow without effect by upstream and downstream pressure fluctuations.
Integrated Inlet Pressure Sensor.
On board Multi display.
Warranty 1% Set Point high accuracy.
Ultra clean design - Metal diaphragm, all stainless SUS-316L and polished surface treatment(standard).
Compact size - Same fitting to fitting dimension up to 50 SLM.
Signal compatibility - Analog/RS485 Digital Model , DeviceNet™ Model.
Network function - Controlled by digital signal.

During 50kPa, upstream pressure fluctuation, Z700 can make stable flow control.

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