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© Techno Fittings S.r.l. Azienda certificata ISO 9001
Numero certificato: 75176272157
Part I.V.A. / Cod. fisc: IT 03745691000
VC Series
The VC series of vaporization controller from
HORIBASTEC can vaporize liquid sources quickly and efficiently. With
conventional buffer-type systems (bubbler or baking systems), the
vapor flow rate is easily affected by changes in temperature and
pressure. The vapor controller measures the liquid source according
to its mass flow rate, resulting in much more reliable vaporization
that is totally unaffected by temperature or pressure.
Datasheet VC Series
The VC-1310 and VC-1410 can be used in conjunction with either a liquid mass flow meter or a high temperature mass flow meter and can be used in a number of applications including , LPCVD, SACVD, CVD, plasma coating, SiO2 thin film, silicon nitride, H2O water vaporisation for fuel cells, etc. Key features.
-
Stable, accurate control of liquid sources.
- High vapor flow is
possible, TEOS 1slm
- Compact size (similar to
a mass flow controller), much smaller than conventional baking or
bubbler systems, allowing for simple integration into system design,
especially within the Semiconductor industry where space is at a premium.
- Stable in any orientation.
- Easy to maintain.
|
Used with a mass flow meter.
|
Used with a high temperature mass flow meter. |
