Reser |
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--------- Robot Refurbishment Program documentat Maintenance Leak Check Adapter documentation |
For more details see pdf file |
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Reser |
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--------- Robot Refurbishment Program documentat Maintenance Leak Check Adapter documentation |
For more details see pdf file |
|||
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Today’s critical process requirements for
semiconductor equipment require complex
mechanics inside the different components of
semiconductor equipment. For example rotational
doorplates in vertical furnaces. To verify if such
rotation doorplate is leak tight before starting
installation of the doorplate in the equipment, RESER
developed an adapter to test the doorplate, which can
be connected to the standard leak test equipment in
your facility.
The flange to the leak test equipment can be made
according to customer specifications. The adapter
can be delivered for all sizes doorplates, and is
standard available for 200mm and 300 mm
equipment.
The adapter can be used to leak test the rotational
mechanism in the center of the doorplate and
possible leakage due to a scratch in the O-ring gap
surrounding the doorplate.