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Sakaguchi Hot Plate
WHPM SERIES PLATEN HEATER FOR VACUUM APPLICATION
Features and application
WHPM Series platen heater provides excellent heat uniformity for heat processing in
vacuum chamber.
Typical application include R&D studying the characteristics of new
material and electronic component materials; and also chemical vapor deposition for
semiconductor wafer processing and liquid crystal PCBs; heat processing for sputtering
and plasma etching.
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