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Sakaguchi Process Line Heater

Sakaguchi Hot Plate

Sakaguchi Bel Liner

Sakaguchi site


Process line heater & system

To secure the best process conditions to manufacture various semiconductors, pipes and valves of the system of semiconductor equipments are required to get rid of particles sublimated inner surface of these system.
PROCESS LINE HEATER heat up pipes and valves of inline and exhaust line so that it cleans the particles liquidized and hardened inside pipes of the system.
Heater consist of flexible flat elements and enables to design any shapes required for application.
Less particle can be allowable with heating distribution evenly along the entire surface of the objects.
Fit and removal installation of PROCESS LINE HEATER is easy and simple for maintenance.

 


FEATURES

Easy installation

It is easy for installation to fit PROCESS LINE HEATER using snap or fasteners.
Remove easily when needed. Wiring is also quickly done with connectors, so you could save time for installation.

Integrated structure

Heater element is fit with silicon rubber and covered over silicon rubber insulation.
Particle and dust generation is decreased so that it is suitable for fitting on.

Temperature control in one system

PROCESS LINE HEATER can be designed for your system, with the temperature controller and sensor. Your maintenance is also easy if necessary.

 

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