SEC-

(Mass Flow Controller)

4400

4500

4550

4600

4400SP

4400SR

4400MF

4500MF

SEF-

(Mass Flow Meter)

4400

4500

4550

4600

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Wetted Materials

M:  SUS-316L  R:  SUS-316L-Viton

M:  SUS-316L  R:  SUS-316L-Viton

SUS-316-L

Valve Type

Open at power-off   Close at power-off

Open at power-off

Open at power-off

Open at power-off   Close at power-off

Flow Range

(for N2 F.S.)

5/10/20/30/50/100

200/300/500 SCCM

1/2/3/5 SLM

10 SLM

20 SLM

30 SLM

50 SLM

50 SLM

100 SLM

5/10/20/30/50

100/200 SCCM

500 SCCM

1~5 SLM

5/10/20/30/50/100

200/300/500 SCCM

1/2/3/5 SLM

10 SLM

20 SLM

Response

less than 1 second (T98)

less than 1 second (T98)

Accuracy

1% F.S.

1% F.S.

1% F.S.(10%~100%)

0.2%F.S.(0.5%~10%

1% F.S.

Linearity

0.5% F.S.

Repeatability

0.2% F.S.

Operating Differential

Pressure (for SEC)

50~300kPa(d)

{10.5~3.0kgf/cm2(d)}

100~300kPa(d)

{1.0~3.0kgf/cm2(d)}

105~300kPa(d)

{1.5~3.0kgf/cm2(d)}

100~300kPa(d)

{1.0~3.0kgf/cm2(d)}

150~300kPa(d)

{1.5~3.0kgf/cm2(d)}

50~300kPa(d)

{0.5~3.0kgf/cm2(d)}

100~300kPa

{1.0~3.0kgf/cm2(d)}

Operating Differential

Pressure (for SEF)

1~300kPa(d)   {0.01~3.0kgf/cm2(d)}  (second pressure : atmospheric pressure)

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Pressure Resistance

1000kPa   {10kgf/cm2 (g)}

Leak Rate

M: 1x10-11Pam3/s (He)     R: 1x10-8Pam3/s (He)

{M: 1x10-10atmcc/sec  (He)}     {R: 1x10-7atmcc/sec  (He)}

 

M:5x10-12Pam3/s (He){5x10-11atmcc/sec  (He)}

R:5x10-8Pam3/s (He){1x10-7atmcc/sec  (He)}

M:5x10-12Pam3/s (He)  {5x1011atmcc/sec  (He)}

Operating Temperature

5~50C (accuracy insurance:  15~35C)

Flow Rate Setting Signal

0.1~5VDC

0.1~5VDC

0.025~5VDC

0.1~5VDC

Flow Rate Output Signal

0~5VDC

0~5VDC

0~5VDC

0~5VDC

Power Supply

+15V0.5VDC  60mA  -15V0.5VDC 60mA  1.8VA

+15V0.5VDC  60mA  -15V0.5VDC 60mA

+15V0.5VDC  80mA  -15V0.5VDC 80mA  2.4VA

Standard Fitting

1/4"VCR

3/8"VCR

1/4"VCR