Gas Mass flow controller analogici

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Azienda certificata ISO 9001

Numero certificato: 75176272157

Part I.V.A. / Cod. fisc: IT 03745691000

Sec-7300 Series

The SEC-7300 series are compact, ultra clean mass flow controllers. The SEC-7300 series covers a wide flow range (1sccm upto 30slm) with the same fitting length of 106mm (124mm option available).

Reliable, Accurate Zero Point / New Type Sensor
Fast Response / New Type PC Board
Compact Size Pioneer Model / Surface Dimension : 106mm: 1SCCM~30SLM(N₂)
Low Differential Pressure Model / Corresponded to SEC-7340:SDS(Safe Delivery System TM) Application Gas / A_sH₃, BF₃, PH₃, etc
Available with IGS

Datasheet SEC-7300 Series

SEC-(Mass Flow Controller)	7320	7330	7340	7350	7355	7340LD
SEF-(Mass Flow Meter)	-------	7330	-------	7350	7355	-------
Wetted Materials	M: SUS-316L R: SUS-316L, Viton
Valve Type	Open at power-off Close at power-off
Flow Range(for SEC)	1/2/3 SCCM	5/10/20/50 100/200/500 SCCM 1/2 SLM	3/5/10 SLM	20/30 SLM	50 SLM (H₂: 100 SLM)	2/3/5/10 SCCM 20 SCCM 15Torr 30 SCCM 20Torr
Flow Range (for SEF)	-------	5/10/20/50 100/200/500 SCCM 1/2/3/5/10 SLM	-------	20/30 SLM	50/100 SLM	-------
Flow Control Range	2~100% F.S.
Response	Less than 1 second (T98)
Accuracy	±1% F.S.
Linearity	±0.5% F.S.
Repeatability	±0.2% F.S.
Operating Differential Pressure (for SEC)	50~300 kPa (d) {0.5~3.0kgf/cm² (d)}			20 SLM: 100~300kPa {1.0~3.0kgf/cm²} 30 SLM: 150~300kPa {1.5~3.0kgf/cm²}	150~300kPa {1.5~3.0kgf/cm²}	1.33~101.3kPa (10~760 Torr)
Operating Differential Pressure (for SEF)	1~300kPa {0.01~3.0kgf/cm²} (secondary pressure : atmospheric pressure)
Pressure Resistance	1000kPa {10kgf/cm²(G)}
Leak Rate	M: 5x10^-12Pa·m³/s(He) R: 1x10^-8Pa·m³/se(He) {M: 5x10^-11atm·cc/sec(He) R: 1x10^-7atm·cc/sec(He)}
Operating Temperature	5~50°C (accuracy insurance: 15~35°C)
Flow Rate Setting Signal	0.1~5 VDC
Flow Rate Output Signal	0~5 VDC
Power Supply	+15V±0.5VDC 60mA -15V±0.5VDC 120mA
Standard Fitting	1/4" VCR equivalent				1/4"·3/8" VCR equivalent	1/4" VCR equivalent

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