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ISO 9001 © Techno Fittings S.r.l.

Azienda certificata ISO 9001

Numero certificato: 75176272157

Part I.V.A. / Cod. fisc: IT 03745691000
Sec-7300 Series

The SEC-7300 series are compact, ultra clean mass flow controllers. The SEC-7300 series covers a wide flow range (1sccm upto 30slm) with the same fitting length of 106mm (124mm option available).
  • Reliable, Accurate Zero Point / New Type Sensor

  • Fast Response / New Type PC Board

  • Compact Size Pioneer Model / Surface Dimension : 106mm: 1SCCM~30SLM(N2)

  • Low Differential Pressure Model / Corresponded to SEC-7340:SDS(Safe Delivery System TM) Application Gas / AsH3, BF3, PH3, etc

  • Available with IGS


Datasheet SEC-7300 Series

SEC-(Mass Flow Controller)

7320

7330

7340

7350

7355

7340LD

SEF-(Mass Flow Meter)

-------

7330

-------

7350

7355

-------

Wetted Materials

M: SUS-316L  R: SUS-316L, Viton

Valve Type

Open at power-off    Close at power-off

Flow Range(for SEC)

1/2/3 SCCM

5/10/20/50
100/200/500 SCCM
1/2 SLM

3/5/10 SLM

20/30 SLM

50 SLM
(H2: 100 SLM)

2/3/5/10 SCCM
20 SCCM 15Torr
30 SCCM 20Torr

Flow Range
(for SEF)

-------

5/10/20/50
100/200/500 SCCM
1/2/3/5/10 SLM

-------

20/30 SLM

50/100 SLM

-------

Flow Control Range

2~100% F.S.

Response

Less than 1 second (T98)

Accuracy

1% F.S.

Linearity

0.5% F.S.

Repeatability

0.2% F.S.

Operating Differential
Pressure
(for SEC)

50~300 kPa (d)    
{0.5~3.0kgf/cm2 (d)}

20 SLM: 100~300kPa
{1.0~3.0kgf/cm2}
30 SLM: 150~300kPa
{1.5~3.0kgf/cm2}

150~300kPa
{1.5~3.0kgf/cm2}

1.33~101.3kPa

(10~760 Torr)

Operating Differential
Pressure
(for SEF)

1~300kPa  {0.01~3.0kgf/cm2}  (secondary pressure : atmospheric pressure)

Pressure Resistance

1000kPa   {10kgf/cm2(G)}

Leak Rate

M: 5x10-12Pam3/s(He)   R: 1x10-8Pam3/se(He)   {M: 5x10-11atmcc/sec(He)   R: 1x10-7atmcc/sec(He)}

Operating Temperature

5~50C (accuracy insurance: 15~35C)

Flow Rate Setting Signal

0.1~5 VDC

Flow Rate Output Signal

0~5 VDC

Power Supply

+15V0.5VDC   60mA   -15V0.5VDC  120mA

Standard Fitting

1/4" VCR equivalent

1/4"3/8" VCR equivalent

1/4" VCR equivalent


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