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ISO 9001 © Techno Fittings S.r.l.

Azienda certificata ISO 9001

Numero certificato: 75176272157

Part I.V.A. / Cod. fisc: IT 03745691000
Sec-Z10D

FIRST 300mm STANDARD. DEVICENET™ CONTROLLED MFC.

  • Compact Mass Flow Controller.
  • Fastest Response - All Ranges / Piezo Actuator / Latest Technology Sensor
  • Ultra Clean / 5 Ra Standard / Minimized Welding Points
  • Standard DeviceNet™ Interface / ODVA Certified
  • Available with IGS
Datasheet Z10D

Model

Z11D

Z11DW

Z12DW

Wetted Materials

316L stainless steel  SUC Treatment standard

Valve Type (Piezo Valve)

Normally open or normally closed : MO, MC

 

Flow Range (N2 0°C:
1 atm)*1

5/10/20/30/50/100
200/300/500 SCCM
1/2/3/5 SLM

10 SLM

5/10/20/30/50/100
200/300/500 SCCM
1/2/3/5 SLM

10 SLM

20 SLM

30 SLM

Value Leak Integrity

2% of F.S. or less

Flow Control Range

2~100% of F.S.

Response

<= 1 sec to within 2% set point

Accuracy

±1% of F.S.

Linearity

±0.5% of F.S.

Repeatability

±0.2% of F.S.

Operating Differential Pressure

7~42psi

(50~300kPa)

14~42psi

(100~300kPa)

7~42psi

(50~300kPa)

14~42psi

(100~300kPa)

21~42psi

(150~300kPa)

Maximum Inlet Pressure

~42psi (~300kPa)

Pressure Resistance

140psi (1MPa)

Leak Integrity

5x10-12Pa·m3/s (He)

Operating Temperature

5~50°C (guaranteed accuracy : 15~45°C)

Power Supply

Applicable for ODVA standard

Power Consumption

3.5 VA max

Connector Location *2

Top or Side

Fittings

IGS

1/4"VCF equivalent or IGS

Mounting Position

Attitude Insensitive

Thickness *3

1.125" (28.5±0.5mm)

1.5" (38.6±.05mm)

Weight

1 kg (2.2 pounds)

1.2 kg (2.6 pounds)



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