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© Techno Fittings S.r.l. Azienda certificata ISO 9001
Numero certificato: 75176272157
Part I.V.A. / Cod. fisc: IT 03745691000
Sec-Z500
MULTI GAS / MULTI RANGE MASS FLOW CONTROLLER
HORIBASTECs SEC-Z500 series multi gas / multi range mass flow controller has been developed to reduce the number of mass flow controllers required to cover the range of flows and gases used in todays Semiconductor Processes.
HORIBASTECs SEC-Z500 series multi gas / multi range mass flow controller has been developed to reduce the number of mass flow controllers required to cover the range of flows and gases used in todays Semiconductor Processes.
Datasheet SEC-Z500
Advantage of SEC-Z500
- High Performance with 32 bit CPU
- Multi Range / Multi Gas
- Only
6 mass
flow controllers needed
to
cover the range 30SCCM to 10SLM
- Ultra Quick Response
- Quick responding at any set point
- Easy to configure on at point and time of use
- Dramatically reduce the stock
- Compatible
to conventional analog MFC
- Simultaneous communication on Analog / Digital
Technology for Multi Range /
Multi Gas
Mass Flow Controllers
-
Wide range controllable piezo valve
(0.5% up to 100% FS) - High Reliability Sensor
- High performance CPU
(Calculation Point and Multi Gas PID)
- Actual Gas Flow Data
The SEC-Z500
Original (factory set) Full Scale can be re-ranged anywhere between
25% and 100%FS.
For example: SEC-Z500 Type "4"
N2 1000SCCM Control Range 20 to 1000SCCM
Change
into 25% FS
N2 250SCCM Control Range 5 to 250SCCM
Control range after changing FS remains 2 to 100% FS.
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